FPS Series

Flexibility
productivity
stability

FPS Series

Flexibility
productivity
stability

FPS Series

Flexibility
productivity
stability

Multi-purpose photomask manufacturing

gets unparalleled flexibility

Our FPS Series of mask writers delivers stable, high-speed and cost-efficient manufacturing of advanced photomasks for multi-purpose applications. Depending on your requirements, they can be flexibly configured to handle a wide range of applications, such as advanced electronic packaging, LED touchscreens, MEMS, color filters, fine metal masks, 3D molds and more.

Reliable and field-proven, all of our mask writers offer the flexibility to handle diverse mask applications, while still achieving outstanding stability of operation, high writing speeds, large writing areas and the CD uniformity you need to handle demanding requirements.

The latest addition to our family, the FPS8100, is specifically designed to meet the growing trend from LCD to AMOLED displays, which requires metal masks for the deposition process of organic materials. With a new platform and added technologies, it offers a 78% increase in writing speed and 87% greater writing area, compared with our well-established FPS6100 series.

The beauty of FPS solutions is that you can continue to manufacture existing products, while also going after lucrative new business opportunities that may require larger panel areas, higher writing speeds, tighter critical dimensions or even fine metal mask manufacturing.


Key benefits

  • 87%

    INCREASED WRITING AREA
  • 76%

    enhanced writing speed
  • 40%

    IMPROVED CD UNIFORMITY

 

  • Master the fine metal mask manufacturing of AMOLED displays with our new FPS8100
  • Enhance your productivity with increased writing area, faster writing speed and reduced overhead time
  • Gain superior image quality with tighter writing grids
  • Upgrade as you grow to our FPS6100 series, from FPS5100/5300/5500


FPS8100

The FPS8100 is our high-end solution for mask producers who want all the flexibility of the FPS concept but face new challenges relating to the microfabrication of LEDs, advanced electronic packages or fine metal mask applications. Developed in close collaboration with demanding customers, it builds on a new platform and includes several new performance-enhancing technologies to improve stability (productivity yield), extend the writing area and speed for multi-purpose applications, compared to earlier models.

The system is configured with two optical levels and features an 87% increase in the writing area (up to 1,400 mm x 1,620 mm; fine metal mask for up to generation-6 display size), compared to the earlier FPS6100 series. It is primarily designed to meet the trend from LCD to AMOLED display technology, which enables better image quality and thinner displays with increased energy efficiency. This technology can also be used for manufacturing bendable displays.

However, the new higher requirements of AMOLED also involve more advanced photomasks since each pixel is controlled by 5-6 transistors, compared with 1-2 transistors for LCD. This requires the deposition of smaller, more accurate organic deposits within each pixel – a new challenge that is uniquely met with the FPS8100. In parallel to this very specific need, you can also handle many other writing applications.

 

FPS6100 series

Reliable and well proven, the FPS6100 is used by some of the world’s leading photomask manufacturers to achieve superior image quality and productivity for advanced multi-purpose applications. Configurable with two different laser sources, the writers in this series let you expose on either chrome or emulsion photomasks.

The FPS6100 offers both higher writing speed and improved image quality compared to the previous FPS5500. Compared to earlier models, it lets you boost writing speeds by up to 76% thanks to the newly developed XT mode option. You also gain a 40% improvement in CD uniformity to meet today’s challenging requirements.

And, if you have an older generation FPS system, it can be upgraded to the FPS6100, providing a very cost-effective way to add both capacity and quality to your business.

 


Specifications

 

FPS6100E    
Writing levels Lvl 40  Lvl 25
Writing speed [mm²/min] 4500 6500
Minimum L/S resolved (pitch/2) 2.0 3.5
CD Uniformity 3σ [nm] 60 80
Registration 3σ [nm] 140 150
Overlay 3σ [nm] 100 120
Max. mask size [mm]     1400x1620

 

FPS6100            
Writing levels Lvl 80 Lvl 60 Lvl 40 Lvl 25 Lvl 20 Lvl 15 
Writing speed [mm²/min] 525 1250 2600 6000 8000 12000
Minimum L/S resolved (pitch/2) 0.75 1.2 2.0 3.5 5.0 7.0
CD Uniformity 3σ [nm] 30 40 60 80 100 200
Overlay 3σ [nm] 70 85 100 120 140 160
Max. mask size [mm]     813x813*

 

FPS6100E Lvl 25 Lvl 20 Lvl 15 
Writing speed [mm²/min] 5000 8000 12000
Minimum L/S resolved (pitch/2) 6.0 8.0 12.0
CD Uniformity 3σ [nm] 600 700 900
Overlay 3σ [nm] 120 140 160
Max. mask size [mm]     813x813*

* Extended mask sizes up to 1100x1100 and 900x1200 available as options


Options


A number of options are available so that you can equip your system to comply precisely with your customer's requirements. These options are also available as value-added products for your already installed FPS6100 systems.

 


Services


Your best partner


With more than 40 years in the electronics industry and a unique market leading position you can count on us.  We understand the fast changes in the market and have a strong local presence in over 50 countries to help our customers. We deliver technologies that are future proof and are devoted to our mission and our clients.

 


Request contact

Do you have a question? Or would you like more information on a specific product or service? We are here for you. Use the form below and we will get back to you.

Please add an email address
Please add a message

Mycronic use cookies to enhance and customize your experience using our web site. By browsing further, you agree that we use cookies.

Read our Privacy and Cookie Policies to find out more.