FPS6100

Fits to various
applications

 
FPS6100

Fits to various
applications

 
FPS6100

Fits to various
applications

Multipurpose photomask manufacturing

gets unparalleled flexibility

The new FPS6100 delivers the increased image quality and productivity that the more advanced segments of the multi-purpose market require today.

FPS6100 can be configured for many applications and production environments: electronic packaging, touchscreens, color filters, fine metal mask, 3D molds, and more. That means that you can fully utilize the system for current products, and at the same time take aim for new business opportunities.

The FPS6100 offers both higher writing speed and improved image quality compared to the previous FPS5500. And if you have an older generation of FPS system, it can be upgraded to the FPS6100 series, providing you with a very cost efficient way to add both capacity and quality to your business.


Key benefits

  • 47%

    enhanced writing speed
  • 80%

    reduced loading time
  • 40%

    improved CD Uniformity

 

  • Enhanced productivity with faster writing speed and reduced overhead time
  • Superior image quality with tighter writing grid
  • Platform expandability with 6 writing levels and emulsion writing
  • Upgradable from FPS5100/5300/5500

Specifications

 

FPS6100 Lvl 80  Lvl 60 Lvl 40 
Writing speed [mm²/min] 525 1250 2600
Minimum L/S resolved (pitch/2) 0.75 1.2 2.0
CD Uniformity 3σ [nm] 30 40 60
Overlay 3σ [nm] 70 85 100
Max. mask size [mm]     813x813*

 

FPS6100 Lvl 25 Lvl 20 Lvl 15
Writing speed [mm²/min] 6000 8000 12000
Minimum L/S resolved (pitch/2) 3.5 5.0 7.0
CD Uniformity 3σ [nm] 80 100 200
Overlay 3σ [nm] 120 140 160
Max. mask size [mm]     813x813*

 

FPS6100E Lvl 25 Lvl 20 Lvl 15 
Writing speed [mm²/min] 5000 8000 12000
Minimum L/S resolved (pitch/2) 6.0 8.0 12.0
CD Uniformity 3σ [nm] 600 700 900
Overlay 3σ [nm] 120 140 160
Max. mask size [mm]     813x813*

* Extended mask sizes up to 1100x1100 and 900x1200 available as options


Options


A number of options are available so that you can equip your system to comply precisely with your customer's requirements. These options are also available as value-added products for your already installed FPS6100 systems.

 


Services


Your best partner


With more than 30 years in the electronics industry and a unique market leading position you can count on us.  We understand the fast changes in the market and have a strong local presence in over 50 countries to help our customers. We deliver technologies that are future proof and are devoted to our mission and our clients.

 


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