Large area measurement

meet the world's most accurate metrology system


Challenge

The crucial component in today’s high-quality displays is their set of photomasks, which must match each other accurately. Overlay and registration show up on the nanometer scale, a scale so small that close to one hundred thousand points can be identified on the width of a human hair!

To verify this level of accuracy and demonstrate compliance with your customer’s specs, you need a measurement system with unprecedented reliability and accuracy.

 

  • Proving to the customer that your photomasks comply with their registration specifications.
  • Assuring consistency between laser mask writers.
  • Matching replacement orders to the original mask set.

Solution

 

The Prexision-MMS can measure mask registration for up to Generation 8 size panels.

By maintaining a consistent and common reference for all your laser mask writers, the Prexision-MMS enables efficient production planning that keeps delivery times short.


Our promise

With the Prexision-MMS, you can take photomask measurement to a whole new level, demonstrate compliance with specs, and utilize the full potential of your laser mask writers.


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