SLX series

Built for a
smarter world

SLX series

Built for a
smarter world

SLX series

Built for a
smarter world

Gear up to meet

today’s fast-paced semiconductor industry

Born out of the rising demand of everyday electronics, the SLX laser mask writer is designed to meet the trend of making everything smarter: consumer goods, cars, Internet of Things devices, cars, medical devices and also industrial manufacturing equipment, to mention a few. This drives the demand for photomasks of mature design nodes due to larger variety of designs required combined with price-sensitive volume manufacturing. The industry prefers to use laser based mask writers due to lower exposure cost per mask thus 70 ~ 75% of all photomasks are produced using laser technolog, declaring laser mask writers as the backbone of the semiconductor industry.

However, laser mask writers in operation today are getting old making production slow and costly and consequently, not efficient for the purpose.

Mycronic addresses this challenge with the SLX series – a new generation cost-effective laser mask writer – built on a modern architecture securing stable and reliable system operation.

Mycronic SLX series photomask equipment

The best choice for cost-efficient production

Mycronic has a unique position as supplier of the world most advanced mask writer for the display industry. For display photomask, fast writing speed with assured quality on an overall photomask area is critical since the photomasks size are 50-100 times larger compared to the photomask used in semiconductor industry. Leveraging the same multibeam writing technology from Mycronic’s most advanced display mask writer, the SLX series can expose 6” photomask as fast as 20 minutes with assured quality. In addition, the SLX series uses a Solid State Laser which minimizes running costs by reducing power consumption. The SLX series is the best system fit for price sensitive mature semiconductor nodes manufacturing.

Mycronic SLX series photomask epuipment

New modern extendable architecture

To meet the electronics market trends, the semiconductor industry has been evolving over time and the photomask industry should accommodate these trends. However, the laser tools in the field are old and difficult to maintain. The SLX series is built on the most up to date HW and SW platforms allowing support flexibility in a rapidly changing world and the possibility to develop new functionalities to meet future customer demands. Thus, the SLX will develop over time and in the future improved and faster models will be released based upon the same platform.

SLX series ultimate system reliability

Access to skilled service from day 1

The SLX series shares the Evo control platform also used for other Mycronic mask writers. This means that our skilled service organization with local presence can support SLX series from day 1 after system installation, allowing maximum system uptime and optimizing system performance which is not possible using the legacy systems in the field.


Key benefits

  • Cost-effective
    Low cost of ownership
  • Long-lasting
    Built on field proven modern platform
  • Trustworthy
    Access to skilled engineer from day 1

Specifications

 

SLX 1 e1

Passes 2P 1P
Writing speed* ~40 mins ~20 mins
CD Uniformity (3σ) 25 nm 35 nm
Registration (3σ) 30 nm 40 nm
Mask size 5”~12”  

SLX 2 e1

Passes 3P 2P 1P
Writing speed* ~97 mins ~64 mins ~32 mins
CD Uniformity (3σ) 12 nm 15 nm 20 nm
Registration (3σ) 20 nm 25 nm 30 nm
Mask size  5”~9”    

SLX 3 e1

Passes 3P 2P 1P
Writing speed* ~169 mins ~113 mins ~56 mins
CD Uniformity (3σ) 10 nm 12 nm 20 nm
Registration (3σ) 20 nm 25 nm 30 nm
Mask size 6”*    

*Estimate exposure time for 6” mask area


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