Born out of the rising demand of everyday electronics, the SLX laser mask writer is designed to meet the trend of making everything smarter: consumer goods, cars, Internet of Things devices, cars, medical devices and also industrial manufacturing equipment, to mention a few.
The Mycronic SLX series is designed with field-proven technology, modern data path management and state-of-the-art optics. The SLX operates fast, reliably and at a lower cost of ownership to meet the rising demand for photomasks for mature semiconductor nodes.
Mycronic has a unique position as supplier of the world most advanced mask writer for the display industry. For display photomask, fast writing speed with assured quality on an overall photomask area is critical since the photomasks size are 50-100 times larger compared to the photomask used in semiconductor industry. Leveraging the same multibeam writing technology from Mycronic’s most advanced display mask writer, the SLX series can expose 6” photomask as fast as 20 minutes with assured quality. In addition, the SLX series uses a Solid State Laser which minimizes running costs by reducing power consumption. The SLX series is the best system fit for price sensitive mature semiconductor nodes manufacturing.
Even for mature semiconductor nodes, keeping the manufacturing technologies, data density continues to increase in order to reach better chip performance. This often requires application of additional compensation algorithms. The SLX series state-of-the-art modern datapath architecture overcomes all these challenges without compromising throughput.
The SLX series is built on the recently launched Evo control platform equipped with the most up to date HW and SW. During production, the Multi-Channel Motion Control (MCMC) board controls all linear movements inside the system and logs all motions and subsystems with high frequencies. The logs can be analyzed and used for system trending enabling stable and reliable system operation.
As a market leader in laser photomask pattern generators for display and multi-purpose industry as well as long term experience in semiconductors, you can count on Mycronic. We understand the fast changes in the market and we have a strong local presence to understand and help our customers. The SLX series will meet the rising photomask demand for mature semiconductor nodes and will be the solution to overcome the challenges that our customers are experiencing and will ensure the long-term success of our customers.