The SLX series Born to run

The new SLX series

Built for a smarter future

Born out of the rising demand of everyday electronics, the SLX laser mask writer is designed to meet the trend of making everything smarter: consumer goods, cars, Internet of Things devices, cars, medical devices and also industrial manufacturing equipment, to mention a few.


The new SLX series

A new semiconductor laser mask writer

The Mycronic SLX series is designed with field-proven technology, modern data path management and state-of-the-art optics. The SLX operates fast, reliably and at a lower cost of ownership to meet the rising demand for photomasks for mature semiconductor nodes.

SLX laser mask writer - cost-efficient production

The best choice for cost-efficient production

Mycronic has a unique position as supplier of the world most advanced mask writer for the display industry. For display photomask, fast writing speed with assured quality on an overall photomask area is critical since the photomasks size are 50-100 times larger compared to the photomask used in semiconductor industry. Leveraging the same multibeam writing technology from Mycronic’s most advanced display mask writer, the SLX series can expose 6” photomask as fast as 20 minutes with assured quality. In addition, the SLX series uses a Solid State Laser which minimizes running costs by reducing power consumption. The SLX series is the best system fit for price sensitive mature semiconductor nodes manufacturing.

SLX laser mask writer - modern Datapath management

Modern datapath management

Even for mature semiconductor nodes, keeping the manufacturing technologies, data density continues to increase in order to reach better chip performance. This often requires application of additional compensation algorithms. The SLX series state-of-the-art modern datapath architecture overcomes all these challenges without compromising throughput.

SLX laser mask writer - ultimate system reliability

Ultimate system reliability

The SLX series is built on the recently launched Evo control platform equipped with the most up to date HW and SW. During production, the Multi-Channel Motion Control (MCMC) board controls all linear movements inside the system and logs all motions and subsystems with high frequencies. The logs can be analyzed and used for system trending enabling stable and reliable system operation.

The market


The new SLX series

Capturing the new emerging semiconductor market

Due to the larger variety of required designs, combined with price-sensitive low volume manufacturing, the trend of electronification of everything (from consumer goods, IoT devices, cars, to medical devices) drives demand for laser photomask writers. In addition, since the industry prefers to use laser based writers, 70-75% of all photomasks produced today use laser technology due to lower exposure cost per mask. This situation is challenging as systems in the field are typically 15-25 years old and difficult to maintain.

Mycronic addresses this challenge with the SLX series, tailormade for the task.

Wide range of applications


Wide range of configuration

SLX series offer three different base models allowing a wide range of configuration choices meeting customers' demand depending on business strategy.

  • SLX 1 e1: the fastest model delivers the greatest productivity for lower-end semiconductor nodes.
  • SLX 2 e1: a well-balanced model for users aiming for both productivity and higher semiconductor nodes.
  • SLX 3 e1: the most advanced model, addressable up to approximately 90 nm semiconductor nodes.

Various options are available and will be further developed for SLX series to further improve system performance and enhance usability to widen the addressable applications.

Skilled service


Access to skilled service from day 1

The SLX series shares the Evo control platform also used for other Mycronic mask writers. This means that our skilled service organization with local presence can support SLX series from day 1 after system installation, allowing maximum system uptime and optimizing system performance which is not possible using the legacy systems in the field.

New modern extendable architecture


New modern extendable architecture

To meet the electronics market trends, the semiconductor industry has been evolving over time and the photomask industry should accommodate these trends. However, the laser tools in the field are old and difficult to maintain. The SLX series is built on the most up to date HW and SW platforms allowing support flexibility in a rapidly changing world and the possibility to develop new functionalities to meet future customer demands. Thus, the SLX will develop over time and in the future improved and faster models will be released based upon the same platform.


Mycronic's commitment


Ensuring the long-term success of the SLX

As a market leader in laser photomask pattern generators for display and multi-purpose industry as well as long term experience in semiconductors, you can count on Mycronic. We understand the fast changes in the market and we have a strong local presence to understand and help our customers. The SLX series will meet the rising photomask demand for mature semiconductor nodes and will be the solution to overcome the challenges that our customers are experiencing and will ensure the long-term success of our customers.




Dennis Kim
Dennis Kim

Market: Korea

Jason Dong
Jason Dong

Market: China

Hisao Ito
Hisao Ito

Market: Japan



Thomas Söderlund
Thomas Söderlund

Market: Rest of world