Display mask writer
Display mask writer
- Productivity For high demands regarding mask writers
- Stability Exceptional MURA quality control
- Flexibility Extreme writing speed with multi beams
Description
World-leading mask writers for tomorrow’s display standards
Everywhere we look today, we find ourselves surrounded by sophisticated display technologies. From TVs and digital signage, to smartphones, IT devices and near eye displays, the Prexision Evo series of laser mask writers play a critical role in this technological revolution. All the world’s manufacturers of advanced flat panel displays use the Prexision Evo series of laser mask writers.
The Prexision Evo series is built on the new state-of-the-art control platform called Evo, designed to support growing trends within automation, connectivity, and big data in the mask manufacturing environment in order to achieve higher product yield. The Evo platform is based upon a fully modern software and electronics architecture ready to meet both current and future requirements from the industry.
Prexision Evo series
Mycronic Prexision series
Prexision 800 Evo
Prexision 80 Evo
Prexision 8 Evo and Prexision 10
Prexision 8 Entry Evo and Prexision Lite 8 Evo
Specification
Prexision 800 Evo |
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Mode | HA | HT |
Minimum L/S resolved (pitch/2) | 550 nm | 850 nm |
CD accuracy (range of averages) | 15 nm | 20 nm |
Mask set overlay (3σ) | 75 nm | 100 nm |
Writing speed | 900 mm²/min | 1200 mm²/min |
Max. mask size | 1400 x 1620 mm |
Prexision 80 Evo |
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Mode | HA | HT |
Minimum L/S resolved (pitch/2) | 750 nm | 1000 nm |
CD accuracy (range of averages) | 30 nm | 35 nm |
Mask set overlay (3σ) | 75 nm | 100 nm |
Writing speed | 900 mm²/min | 1200 mm²/min |
Max. mask size | 1400 x 1620 mm |
Prexision 8 Evo |
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Mode | HA | HT |
Minimum L/S resolved (pitch/2) | 750 nm | 1000 nm |
CD accuracy (range of averages) | 70 nm | 85 nm |
Mask set overlay (3σ) | 90 nm | 120 nm |
Writing speed | 900 mm²/min | 1200 mm²/min |
Max. mask size | 1400 x 1620 mm |
Prexision 10 |
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Mode | HA | HT |
Minimum L/S resolved (pitch/2) | 750 nm | 1000 nm |
CD accuracy (range of averages) | 70 nm | 85 nm |
Mask set overlay (3σ) | 90 nm | 120 nm |
Writing speed | 900 mm²/min | 1200 mm²/min |
Max. mask size | 1700 x 2000 mm |
Prexision 8 Entry Evo and Prexision Lite 8 Evo |
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System | Prexision 8 Entry Evo | Prexision Lite 8 Evo |
Minimum L/S resolved (pitch/2) | 1200 nm | 1200 nm |
CD accuracy (range of averages) | 85 nm | 85 nm |
Mask set overlay (3σ) | 120 nm | N/A |
Writing speed | 1350 mm²/min | 1350 mm²/min |
Max. mask size | 1400 x 1620 mm |
Brochures
The new Prexision Series
The new Prexision series Setting the global standards for displays.