Semiconductor mask writer
- Productivity Low cost of ownership
- Sustainability Long lasting - built on field proven modern platform
- Reliability Access to skilled engineer from day 1
The next step in our journey – The SLX series
In 2019, Mycronic experienced an increasing demand for mature semiconductor nodes driven by the progress of making everything smarter – from consumer goods to cars and all the way to industrial manufacturing equipment. As these applications expanded, so did the need for cost-efficient photomask production, placing new demands on productivity, flexibility and cost per mask.
The industry prefers to use laser-based mask writers due to lower exposure cost per mask thus 70 ~ 75% of all photomasks are produced using laser technology, declaring laser mask writers as the backbone of the semiconductor industry. However, laser mask writers in operation today are getting old making production slow and costly and consequently, not efficient for the purpose.
Mycronic addressed this challenge with the introduction of the SLX platform. Since 2019, we continue to invest and develop the SLX product series. Today, we are ready for the next step in our journey, introducing the next generation of SLX: SLX Kite.
The SLX series
SLX e3
With SLX Kite, we take a major step forward in laser mask writing. Built on the proven SLX platform,. SLX e3 (Kite) combines next-generation 29-beam optics, software-configurable capacity scaling and improved registration performance, enabling customers to adapt capacity to production requirements while maintaining a clear path for future growth. These advancements further strengthen the SLX platform as the industry workhorse for Laser Binary, Phase Shift Mask (PSM), EUV Zero Layer and Black Border applications.
By extending the addressable application range and enabling users to balance productivity and accuracy according to their needs, SLX e3 (Kite) opens new opportunities to replace low-end e-beam capacity with a highly productive laser-writing solution. The result is more addressable layers, faster second-layer writing and lower cost of ownership.
Powered by MyIntelligence
Built on the next-generation SLX platform, SLX Kite combines industry-leading throughput, flexible capacity scaling and enhanced performance. Together with MYIntelligence, SLX Kite supports data-driven manufacturing by enabling advanced data collection, analysis and future tool-to-tool communication, helping mask shops improve productivity, process control and operational efficiency.
Access to skilled service from day 1
The SLX series shares the Evo control platform also used for other Mycronic mask writers. Thus, our skilled service organization with a strong local presence can support the SLX series from day 1 after system installation, allowing maximum system uptime and optimizing system performance.
Wide range of configuration
The SLX series comes in four different base models allowing a wide range of configuration choices to meet customers’ demands.
- SLX 1 e3, the high-throughput i-line model delivers utmost productivity for lower-end semiconductor nodes.
- SLX 2 e3, a well-balanced workhorse for users aiming for both productivity and higher semiconductor nodes.
- SLX Lite 3 e3, a DUV model optimized for Phase Shift Mask application.
- SLX 3 e3, the most advanced model, addressing the growing ”low-end e-beam” market
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SLX™ series
Mycronic SLX series.
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