S3
- Productivity 4 ultra-light carbon test heads with air bearings
- Stability Granit base frame for highest accuracy
- Flexibility Supports high-end substrate applications
Description
The S3 is able to test 10 µm structures while achieving 100 measurements per second. The machine, therefore, provides the customer with an economical test solution for high-end substrates.
The S3 has a granite frame, which provides the best temperature stability. The high-resolution cameras of 1.2 µm per pixel allow automatic scanning and testing of 10 µm.
The system combines accuracy and low witness marks with high throughput. The vacuum table allows easy handling of substrate and facilitates capacitance based testing.
Specification
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4 test heads |
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Ceramic air bearings for ultra-precise and sensitive contacting |
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Max. test area mode |
300 mm x 310 mm (11.8"x 12.2") |
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Max. product size |
330 mm x 310 mm (13.0" x 12.2") |
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Vacuum table for reference-based test |
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Test speed |
up to 120 TP/sec (depending on test method) |
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Smallest pad size |
10 µm (0.4 mil) |
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Smallest pitch size |
25 µm (1.0 mil) |
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5-megapixel high-solution camera with 1.2 µm/px |
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No visible witness marks without sacrificing test speed |
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Options
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High-speed Kelvin 4 wire test up to 300 mA, Embedded component test SECS/GEM integration on demand
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Customized automation setup on request
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