- 8 Head test system for rigid and flexible products
Atg's rich application software provides a wide range of measurement functionality.
Everywhere we look today, we find ourselves surrounded by sophisticated display technologies. From digital signage and TVs, to smartphones and heads-up displays, the Prexision series of laser mask writers play a critical role in this technological revolution. All the world’s manufacturers of advanced flat panel displays use the Prexision series of laser mask writers.
The Prexision series is built on the new state-of-the-art control platform called Evo, designed to support growing trends within automation, connectivity, and big data in the mask manufacturing environment in order to achieve higher product yield. The Evo platform is based upon a fully modern software and electronics architecture ready to meet both current and future requirements from the industry.
Learn more about the Evo control platform:
There has been a fast technological development within the display industry, the pixels getting smaller and smaller and trend towards more complex display such as AMOLED. This trend requires more complicated pixel designs and more pattterns inside pixel. Prexision 800 Evo is designed to support efficient production of the most advanced display such as high resolution AMOLED displays for flagship smartphones. With 25% increase in resolution Prexision 800 Evo will deliver superior benefits to mask makers since the significant improvement of CD Uniformity and better pattern fidelity can be achieved without jeopardizing productivity by setting a new resolution standard.
The Prexision 80 Evo is for photomasks for up to Generation-8 size panels for the ever-increasing pixel density of smartphone and tablet displays. For the highest resolution AMOLED and LCD displays, the Prexision 80 Evo gives unsurpassed photomask quality. With 70% better global and local placement performance, our Prexision 80 Evo is taking photomask quality to new heights.
Prexision 8 Evo and Prexision 10 are the best fit for the volume production of advanced TFT-LCD photomasks. Prexision 8 Evo supports the photomask size up to Generation-8 and Prexision 10 supports up to Generation-10. Prexision 8 Evo and Prexision 10 offer 20% increase in writing speed with dual writing modes which will allow you to optimize both throughput and quality depending on Generation size.
Prexision Lite 8 Evo is the latest Prexision series that is designed to meet the requirements for cost-efficient production of photomasks for mainstream displays up to G8 mask size. Despite the clear trend towards more advanced photomasks for displays, the market for less complex photomasks will remain a significant and important segment. Prexision Lite 8 Evo is the fastest mask writers for display application which is a 35% improvement compared to the corresponding legacy mask writers.
Atg's rich application software provides a wide range of measurement functionality.
Prexision 800 Evo | ||
Mode | HA | HT |
Minimum L/S resolved [pitch/2] | 550 | 850 |
CD accuracy [nm] | 15 | 20 |
Mask set overlay 3σ [nm] | 75 | 100 |
Writing speed [mm²/min] | 900 | 1200 |
Max. mask size [mm] | 1400 x 1620 | 1400 x 1620 |
Prexision 80 Evo | ||
Mode | HA | HT |
Minimum L/S resolved [pitch/2] | 750 | 1000 |
CD accuracy [nm] | 30 | 35 |
Mask set overlay 3σ [nm] | 75 | 100 |
Writing speed [mm²/min] | 900 | 1200 |
Max. mask size [mm] | 1400 x 1620 |
Prexision 8 Evo | |||
Mode | Entry | HA | |
Minimum L/S resolved [pitch/2] | 1200 | 750 | 1000 |
CD accuracy [nm] | 85 | 70 | |
Mask set overlay 3σ [nm] | 120 | 90 | 120 |
Writing speed [mm2/min] | 1350 | 900 | 1200 |
Max. mask size [mm] | 1400 x 1620 |
Prexision Lite 8 Evo | Prexision 10 | ||
Mode | Entry | HA | HT |
Minimum L/S resolved [pitch/2] | 1200 | 750 | 1000 |
CD accuracy [nm] | 85 | 70 | 85 |
Mask set overlay 3σ [nm] |
- | 90 | 120 |
Writing speed [mm²/min] | 1350 | 900 | 1200 |
Max. mask size [mm] | 1400 x 1620 | 1700 x 2000 |
The new Prexision series Setting the global standards for displays.
We understand the fast changes in the market and have a strong local presence in over 50 countries to help our customers. We deliver technologies that are future proof and are devoted to our mission and our clients.