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Display mask writer

  • Productivity For high demands regarding mask writers
  • Stability Exceptional MURA quality control
  • Flexibility Extreme writing speed with multi beams

Description

World-leading mask writers for tomorrow’s display standards

Everywhere we look today, we find ourselves surrounded by sophisticated display technologies. From TVs and digital signage, to smartphones, IT devices and near eye displays, the Prexision Evo series of laser mask writers play a critical role in this technological revolution. All the world’s manufacturers of advanced flat panel displays use the Prexision Evo series of laser mask writers.

The Prexision Evo series is built on the new state-of-the-art control platform called Evo, designed to support growing trends within automation, connectivity, and big data in the mask manufacturing environment in order to achieve higher product yield. The Evo platform is based upon a fully modern software and electronics architecture ready to meet both current and future requirements from the industry.

Prexision Evo series

Mycronic Prexision series

Prexision 8000 Evo

Displays continue to innovate delivering splendid imaging experiences puts an ever-increasing demand for higher refresh rates with energy efficiency considered in combination with larger display size. In addition, emerging extended reality market, requiring high resolution near-eye displays push the need for higher precision due to complexity increase in pixel design to a new, previously unseen level. The Prexision 8000 Evo is the latest and most advanced mask writer to date. It introduces a series of innovation that greatly improve resolution, positioning accuracy and stability without jeopardizing productivity. The Prexision 8000 Evo will counter all challenges seen in these days and will effectively support in developing the displays of the future.

Prexision 800 Evo

There has been a fast technological development within the display industry, the pixels getting smaller and smaller and trend towards more complex display such as AMOLED. This trend requires more complicated pixel designs and more patterns inside pixel. Prexision 800 Evo is designed to support efficient production of the most advanced display such as high resolution AMOLED displays for flagship smartphones. With 25% increase in resolution Prexision 800 Evo will deliver superior benefits to mask makers since the significant improvement of CD Uniformity and better pattern fidelity can be achieved without jeopardizing productivity by setting a new resolution standard.

Prexision 80 Evo

The Prexision 80 Evo is for photomasks for up to Generation-8 size panels for the ever-increasing pixel density of smartphone and tablet displays. For the highest resolution AMOLED and LCD displays, the Prexision 80 Evo gives unsurpassed photomask quality. With 70% better global and local placement performance, our Prexision 80 Evo is taking photomask quality to new heights.

Prexision 8 Evo and Prexision 10

Prexision 8 Evo and Prexision 10 are the best fit for the volume production of advanced TFT-LCD photomasks. Prexision 8 Evo supports the photomask size up to Generation-8 and Prexision 10 supports up to Generation-10. Prexision 8 Evo and Prexision 10 offer 20% increase in writing speed with dual writing modes which will allow you to optimize both throughput and quality depending on Generation size.

Prexision 8 Entry Evo and Prexision Lite 8 Evo

Prexision 8 Entry Evo and Prexision Lite 8 Evo is the latest Prexision series that is designed to meet the requirements for cost-efficient production of photomasks for mainstream displays up to G8 mask size. Despite the clear trend towards more advanced photomasks for displays, the market for less complex photomasks will remain a significant and important segment. Prexision 8 Entry Evo is upgradable to complete Prexision 8 Evo offering a wide range of choices depending on the user’s business strategy.

Specification

Prexision 8000 Evo

Mode HA HT
Minimum L/S resolved (pitch/2) 500 nm 750 nm
CD accuracy (range of averages) 15 nm 20 nm
Mask set overlay (3σ) 65 nm 90 nm
Writing speed 900 mm²/min 1200 mm²/min
Max. mask size 1400 x 1620 mm

Prexision 800 Evo 

Mode HA HT
Minimum L/S resolved (pitch/2) 550 nm 850 nm
CD accuracy (range of averages) 15 nm 20 nm
Mask set overlay (3σ) 75 nm 100 nm
Writing speed 900 mm²/min 1200 mm²/min
Max. mask size 1400 x 1620 mm

Prexision 80 Evo

Mode HA HT
Minimum L/S resolved (pitch/2) 750 nm 1000 nm
CD accuracy (range of averages) 30 nm 35 nm
Mask set overlay (3σ) 75 nm 100 nm
Writing speed 900 mm²/min 1200 mm²/min
Max. mask size 1400 x 1620 mm

Prexision 8 Evo

Mode HA HT
Minimum L/S resolved (pitch/2) 750 nm 1000 nm
CD accuracy (range of averages) 70 nm 85 nm
Mask set overlay (3σ) 90 nm 120 nm
Writing speed 900 mm²/min 1200 mm²/min
Max. mask size 1400 x 1620 mm

Prexision 10

Mode HA HT
Minimum L/S resolved (pitch/2) 750 nm 1000 nm
CD accuracy (range of averages) 70 nm 85 nm
Mask set overlay (3σ) 90 nm 120 nm
Writing speed 900 mm²/min 1200 mm²/min
Max. mask size 1700 x 2000 mm

Prexision 8 Entry Evo and Prexision Lite 8 Evo

System Prexision 8 Entry Evo Prexision Lite 8 Evo
Minimum L/S resolved (pitch/2) 1200 nm 1200 nm
CD accuracy (range of averages) 85 nm 85 nm
Mask set overlay (3σ) 120 nm N/A
Writing speed 1350 mm²/min 1350 mm²/min
Max. mask size 1400 x 1620 mm

Brochures

Prexision™ Series

The new Prexision series setting the global standards for displays. 

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Services

Service for Pattern Generators

Superior service for superior performance

Our MYCare service offering for our advanced Pattern Generators is a key part of our commitment to our customers. Our objectives are to maximize throughput, performance and yield for the lifetime of every Mycronic system installed.

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