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Mask metrology system

Mask metrology system

  • 30% Better registration
  • 20% Better overlay mask to mask
  • 30% Shorter turnaround time


Mask metrology system proves your quality

To demonstrate specs compliance, you must be able to prove that the patterns on photomasks will be properly aligned during the production of the display. In order to accomplish this, you need measurement equipment with even better precision than the laser mask writer.

The Precision MMS series is built on the new state-of-the-art control platform called Evo, designed to support growing trends within automation, connectivity, and big data in mask manufacturing environments in order to achieve higher product yield.

The Evo platform is based upon a fully modern software and electronics architecture ready to meet both current and future requirements from the industry. Learn more about the Evo control platform.



  Prexision MMS
G8 Evo model
Prexision MMS
G10 model
Overlay the mask-to-mask 3σ [nm] 40  
Registration 3σ [nm] 65    
CD repeatability 3σ [nm] 50    
The mask size [mm] 1400 x 1620 1700 x 2000  


Service for Pattern Generators

Superior service for superior performance

Our MYCare service offering for our advanced Pattern Generators is a key part of our commitment to our customers. Our objectives are to maximize throughput, performance and yield for the lifetime of every Mycronic system installed.


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Photomask equipment

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Your best partner

Your best partner

You can count on us

With more than 40 years in the electronics industry and a unique market-leading position, you can count on us. We understand the fast changes in the market and have a strong local presence in over 50 countries to help our customers. We deliver technologies that are future-proof and are devoted to our mission and our clients.